Standard Mass Flow Controller MODEL 3660 kolfoc Vietnam
Hãng sản xuất: KOFLOC
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live:ha_1652STANDARD MASS FLOW CONTROLLER MODEL 3660 kofloc Vietnam, STANDARD MASS FLOW CONTROLLER MODEL 3660 kofloc Viet nam. STANDARD MASS FLOW CONTROLLER MODEL 3660 kofloc
KOFLOC Vietnam, KOFLOC Viet nam, KOFLOC
Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.
Features
・Equipped with an advanced flow sensor of constant-current tem-perature difference detection type to ensure high-speed response
・Use of a normally closed valve to ensure safety
・High reliability ensured using a solenoid actuator
・Low differential pressure type control available for combustible gases (LP option)
Standard Specifications
| Model | 3660 | 3665 |
| Flow range (N2 equivalent, 20℃/1 atm) |
10 SCCM–20 SLM (freely selectable) |
30 SLM–100 SLM (freely selectable) |
| Sensor | Thermal mass flow sensor | |
| Valve type | Proportional solenoid valve (closed when not energized) | |
| Control range | 2–100% (F.S.) | 5–100% (F.S.) |
| Response | 2 sec. or less (0–100% within ±2% typical) |
3 sec. or less (0–100% within ±2% typical) |
| Accuracy | ±1.0% F.S. (25℃) | ±1.5% F.S. (25℃) |
| Temperature coefficient | ±0.1 F.S./℃ (15–35℃) | ±0.2 F.S./℃ (15–35℃) |
| Repeatability | ±0.5%F.S. | |
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa (G) | F.S. ≤ 50 SLM: 150–300 kPa (G) |
| F.S. > 100 SLM: 50–300 kPa (G) | F.S. > 50 SLM: 200–300 kPa (G) | |
| Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available. |
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| Allowable operating pressure | 500 kPa (G) or less | |
| Proof pressure | 980 kPa (G) | |
| Leak rate | 1 × 10-8 Pa・m3/s or less (excluding permeation of He) | |
| Allowable ambient temperature | 5–45°C | |
| Allowable ambient humidity | 10–90% (No condensation allowed) | |
| Materials of parts in contact with gases |
Body: SUS316 | |
| Valve seat: FKM (option: CR or NBR) | ||
| Sealing: FKM (option: CR or NBR) | ||
| Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard | |
| Flow rate input signals | 0–5 VDC (Input impedance: 1 MΩ or more) | |
| Flow rate output signals | 0–5 VDC (External load resistance: 250 kΩ or more) | |
| Required power supply | +15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA | |
| Joint (Main unit bore) | Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc. |
| Weight | Approx. 1000 g | Approx. 1500 g |
