Mr. Hà
live:ha_1652Pressure Regulator Valve MODEL 6610 SERIES
This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracyof the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.
Features
• High-precision regulation on the low-pressure side
High regulation performance with repeatability of ±1% or less when the pressure on the primary side and load resistance on the secondary side change under the set pressure condition of 0.01–0.15 MPa.
• Non-grease specification
The sections in contact with gas are made of stainless steel, Viton, and Teflon without using grease. This valve is ideal for the semiconductor industry which requires ultra-clean conditions.
• Lock nut
The regulating position, once it has been set, can be fixed by a lock nut to prevent the setting from changing.
• Non-bleed type
This non-bleed type valve prevents gas from leaking to the outside.
Applications
• Gas chromatography
• High-purity gas control
• Low-pressure controllers
• Semiconductor industry
